Add-on a real-time watchdog and monitoring with graphic display
By adding an independent real-time data collection, display and analysis system with sophisticated alarms, errors are eliminated, historical analysis is enabled, and both historical and real-time data can be displayed.
The TadiGuard can predict and alarm on errors such as:
etc., etc., etc….
Data can be selected by lot numbers, recipes, locations, full SPC on all parameters is available, remote access and tool-to-tool, batch-to-batch comparison, etc.
Some typical screen examples:
Typical Real-time display with status mimic
One lot history display with cursors and results table
Sput 1 Voltage / Current / Pod Press overlay (waterfall)
Sput 3 Voltage trend, SPC X-chart. Number of wafers: 9934
Sput 3 voltage trend: Note target changes at pre-set voltage level. Number of wafers: 9934
Sput 1 Power, W, Lot#, Recipe over 12 Hours, 373 Wafers
Sput 1 Current trend, 14796 wafers